 Figure 3a-c: (a) Sensor electrode configuration (b) heater and RTD configuration (c) completed sensor package Fourteen tungsten trioxide sensors with various dopants were produced at the University of Maine’s LASST (Laboratory of Advanced Surface Science and Technology). The last set was delivered in early February. The sensors were designed with various dopants to separate the response to different gases. Platinum, gold, tin oxide and cupric oxide were used as dopants. The sensors were fabricated with interdigitated platinum electrodes underneath the tungsten trioxide sensor material, and a platinum heater and RTD on the reverse side of the chip. The RTD will allow separate measurement of the temperature of the sensor without the need to back out the temperature from the heater itself. Future Work
We will determine the sensor output for high and low CO concentrations as a function of heater temperature to determine the optimum operating temperature. Then, using the heater control software developed for the ozone sensor, we will determine the dependence of the sensor on CO concentration in the presence of different interfering gases e.g. NOx, ozone, and SO2 for the different dopants. At the minimum we will be able to separate the effect of CO from the interfering gases. We may be able to infer the concentration of several gases with an array of these sensors.
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